Fraunhofer magazine 4.20 - 63 The three winners (f.l.t.r.): Dr. Sergiy Yulin, Fraunhofer IOF, Dr. Peter Kürz, ZEISS, and Dr. Michael Kösters, TRUMPF. © All photos: German Future Prize / Ansgar Pudenz Research to the extreme” was the title this magazine gave to its portrait of Fraunhofer researcher Dr. Sergiy Yulin in October. Television viewers were able to experience pure joy on ZDF on November 25. In front of live cameras, Federal President Frank-Walter Steinmeier awarded the 250,000 euro German Future Prize to the scientist from the Fraunhofer Institute for Applied Optics and Precision Engineering IOF in Jena and his fellow researchers Dr. Peter Kürz from ZEISS and Dr. Michael Kösters from TRUMPF. This is the ninth time (see below) Fraunhofer researchers have won this prize awarded by the Federal President – start- ing in 2000, when Karlheinz Brandenburg, Bernhard Grill and Harald Popp received the German Future Prize for their “MP3 compression of audio signals in hi-fi quality”. The 24th award ceremony again honored a technology that has what it takes to change – and improve – people’s everyday lives. The award-winning process for chip production will make micro- chips smaller, more powerful, energy-efficient and cheaper in production. Fraunhofer President Prof. Reimund Neugebauer clearly described the potential in his congratulatory speech: “They used EUV lithography to develop a technology that will cause a digitalization boost worldwide and they have thus laid the foundation for further innovations.” The first smart- phones with EUV-lithographically manufactured microchips have been on the market since 2019. The research result is minute in size, the effort gigantic. Optical lithography, key technology in microchip production for over four decades, is fast approaching its limits. With EUV litho graphy, Fraunhofer, ZEISS and TRUMPF are once again throwing the door wide open to the future – to new potentials for digitalization, artificial intelligence, autonomous driving and Industrie 4.0. A single chip, no bigger than a finger nail, can now accommodate more than ten billion transistors. To make this possible, researchers have pushed the boundaries of current technology. The breakthrough that is set to make EUV lithography ready for series production broke a number of records. The world’s most powerful pulsed industrial laser, developed by TRUMPF AG, ignites – to generate the extreme ultraviolet light – some 50,000 tin droplets per second in a plasma source at a temperature of 220,000 degrees Celsius: that is 40 times hotter than the surface of the sun. Highly precise collector mirrors and projection optics, produced at ZEISS AG on lithographic photomasks, direct the radiation. The nuclear precision and the high reflectance achieved by the mirrors are the result of the coating technology of Fraunhofer researcher Yulin. He explains, “In our coating system, we apply 100 nano layers, which must all be exactly the same thickness, to a mirror substrate.” Let us make a comparison to get some idea of the precision involved: if we were to widen this mirror to the size of Germany, the great- est unevenness would be 0.1 millimeter. Besides Fraunhofer IOF in Jena, Fraunhofer IWS in Dresden and Fraunhofer ILT in Aachen have also been conducting research into coatings and EUV radiation sources for many years. The perfect coating composition for mirror optics is Sergiy Yulin’s life work. His route into EUV lithography and hence to winning the German Future Prize started in 1988 during his studies in his home country, the Ukraine. He even wrote his thesis on the subject. “30 years of research are not so unusual for a technology of this complexity,“ he says dismissively. And adds: “What has always fascinated me about the work with extremely short wavelengths is its huge application potential. It simply has to be exploited.” Federal President Frank-Walter Steinmeier said on the evening of the award ceremony: “They are outstanding people, the ones whose ideas created projects and whose projects created products.” “They are outstanding people, the ones whose ideas created projects and whose projects created products.” Federal President Frank-Walter Steinmeier “30 years of research are not so unusual for a technology of this complexity,“ says Dr. Sergiy Yulin, Fraunhofer IOF. “Organic electronics – more light and energy from ultra-thin molecular coatings” Karl Leo (spokesperson), Jan Blochwitz-Nimoth, Martin Pfeiffer, Technical University/Fraunhofer Institute for Photonic Microsystems IPMS, Dresden, Novaled AG, Dresden, Heliatek GmbH, Dresden 1 1 0 2 “Binaural hearing aids – spatial hearing for everyone” Birger Kollmeier (spokes- person), Volker Hohmann, Torsten Niederdränk, Carl von Ossietzky University of Oldenburg/Fraunhofer Institute for Digital Media Technology IDMT, Ilmenau, Siemens AG, Munich 2 1 0 2 3 1 0 2 “Ultrashort pulse lasers for industrial mass pro- duction – manufacturing with light flashes” Jens König (spokesperson, Bosch), Stefan Nolte, Dirk Sutter, Robert Bosch GmbH with Schwieberdingen Development Center, Friedrich-Schiller University Jena, Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Jena, TRUMPF Laser GmbH + Co. KG, Schramberg 4 1 0 2 “Food ingredients from lupines – contributing to a balanced diet and providing a richer source of protein” Stephanie Mittermaier (spokesperson), Peter Eisner and Katrin Petersen (Prolupin GmbH, Grimmen) and Fraunhofer Institute for Process Engineering and Packaging IVV, Freising “EUV lithography – new light for the digital age” Dr. Peter Kürz (spokesper- son), Dr. Michael Kösters, Dr. Sergiy Yulin, Carl Zeiss SMT GmbH, Oberkochen, TRUMPF Lasersystems for Semiconductors Manufacturing GmbH, Ditzingen, Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Jena 0 2 0 2